CRT-TRC內外置孿生旋轉陰極
產品規格:
1.旋轉陰極端頭尺寸:W130*L115*H150mm;
2.陰極襯管直徑:內Ф80*外Ф90mm;
3.耐壓真空度:優于2*10-4Pa;
4.靶材允厚:5-20mm(含導熱連接層);
5.施電功率密度:小于20KW/米;
6.磁場均勻性:小于5%(沉積區內);
7.冷卻系統:Φ10mm進出水管,水溫小于18℃;
8.進氣方式:科瑞達真空優化進氣設計;
9.安裝方式:垂直安裝、水平安裝和任意角度安裝。
CRT-TRC Iner & Outer Twin Rotating Cathode
Specification:
1. TRC Tip Size: W130*L115*H150mm
2. Liner tube : Ф90mm
3. Ultimate pressure: less than 2*10-4Pa
4. Thickness of Target: 5-20mm
5. Power Density: <20KW/m
6. Uniformity of Magnetic filed Density: <5%
7. Cooling Water: Φ10mm tube,T.<18℃
8. Inlet of Gas: Optimized by CRT Vacuum
9. Installation: Vertical, Horizontal any Angle
技術特點:
1、產能高,適合復雜的零件;
2、在原子層厚度上控制膜層厚度和膜層均勻性;
3、高光學透過率;
4、濺射膜層應力低;
5、高環境穩定性;
6、高工藝可重復性;
7、應用靈活。
Technical Features:
1. High Production yield for very complex parts.
2. Atomic level control of film thickness uniformity.
3. High optical teansmission.
4. Low stress coatings.
5. High environmental stability.
6. High process repeatability.
7. Application flexibility.
以上信息為武漢科瑞達真空科技有限公司所有