CRT-H300連續中試實驗線

產品規格:

1.真空室：W450*L4000*H1000mm

2.最 大可鍍工件直徑：2*300*300mm

3.極限真空度：優于6*10-4Pa

4.抽氣時間：大氣壓~6*10-3Pa小于3h

5.工作真空：1*10-1Pa~101Pa

6.陰極尺寸：80*420mm

7.真空系統：機械泵+羅茨泵+分子泵

8.樣品加熱：鎧裝加熱管（最 高溫度500℃）

CRT-H300 Pilot  Inline Coating System

Specification:

1. Vacuum Chamber: W450*L4000*H1000mm

2. Workpiece Dimension: 2pcs*300*300mm

3. Ultimate Pressure: 6*10-4Pa

4. Pump Time: ATM.~6*10-3Pa less than 3h 

5. Working Pressure:  1*10-1Pa ~101Pa

6. Cathode : Flat Cathode with size of 80*420mm

7. Pump: Mechanical pump + Roots Pump + Turbo Molecular Pump 

8. Heater: Stainless Steel Heating Tube (Tmax=500 ℃ )

技術特點：

1.本實驗線為立式磁控濺射實驗鍍膜線，有四室結構，為進片室，過渡室1，鍍膜室，過渡室2；鍍膜室內有一對（兩個）平面陰極靶；

2.內部采用不銹鋼鎧裝加熱器，并有四層鏡面板進行保溫以獲得穩定均勻的溫度場；

3.本實驗線為可以完成AZO鍍膜、CIG鍍膜、ZnO鍍膜，配合退火爐完成CIGS全套實驗。

4.特別適合小型企業、科研單位和高校使用。

Technical Features:

1.This Pilot Inline  consists of four Vacuum chambers, such as inlet chamber, transition chamber 1 with a linear ion source, transition chamber 2  the coating chamber with a twin flat cathode. 

2. The Stainless Steel Heating Tubes with four mirror panels in the Chamber provide the stable temperature field. 

3. The machine can sputter AZO coating, CIG coating  ZnO coating for CIGS cell Process.

4. It is suitable for small enterprises, scientific research units  universities.